BACO xT-i6 PVD SYSTEM - Product

 Gyeonggi-do  -  South Korea
Verified company
BACO xT-i6 PVD SYSTEM
  • BACO xT-i6 PVD SYSTEM
Wafer Size : 6", Load-lock casstte 15 Slot
Auto loading system
Process chamber : DC Power [Option DC+RF]
Process chamber : DC Power [Option DC+RF]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO
Mosfet ,Power Semiconductor Device...

Description of the Product

Wafer Size : 6", Load-lock casstte 15 Slot
Auto loading system
Process chamber : DC Power [Option DC+RF]
Process chamber : DC Power [Option DC+RF]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO
Mosfet ,Power Semiconductor Device

1. Wafer loading system
2. Load-lock chamber
3. Process chamber#1
4. Process chamber#2
5. Unload-lock chamber
6. Wafer unloading system

Price of the Product

From 550000.00 USD

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Company catalogues -  Baco-solution

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About BACO-SOLUTION (English)

24 pages

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