BACO xT150-300 PVD SYSTEM - Product

 Gyeonggi-do  -  South Korea
Verified company
BACO xT150-300 PVD SYSTEM
  • BACO xT150-300 PVD SYSTEM
Wafer Size : 6",12" Load-lock casstte 10 Slot
Transfer chamber 6",12" Wafer moving
3-Co Deposition #1 6" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 Pulse DC Power, Gun3 Pulse DC Power]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO
...

Description of the Product

Wafer Size : 6",12" Load-lock casstte 10 Slot
Transfer chamber 6",12" Wafer moving
3-Co Deposition #1 6" Wafer  rotation type
[Gun1 RF+DC Power ,Gun2 Pulse DC Power, Gun3 Pulse DC Power]
3-Co Deposition #2 12" Wafer rotation type
[Gun1 RF+DC Power ,Gun2 DC Power, Gun3 DC Power]
Process : Metal , Oxide , TCO

1. Load-lock chamber 
2. Transfer chamber 
4. 3-Co deposition#1 [6" wafer]
5. 3-Co deposition#2 [12" wafer]

Price of the Product

From 950000.00 USD

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